sales@plutosemitech.com | WhatsApp:  +86-17701852595
HomeNews Industry News How It's Made Silicon Wafer?

How It's Made Silicon Wafer?

2025-08-06

As a manufacturer of Silicon Wafers, we're often asked about the fascinating process that transforms raw sand into the ultra-pure, mirror-like discs powering all modern electronics. Here's an in-depth look at how we create the foundation of the semiconductor industry.

Stage 1: From Sand to Semiconductor-Grade Silicon

1.1 Silicon Purification

The journey begins with ordinary quartzite sand (SiO₂) mined from select locations worldwide. Through a multistep refinement process:

  • Carbothermic Reduction: Sand is mixed with carbon and heated to 2000°C in arc furnaces, producing 98% pure metallurgical-grade silicon (MGS)

  • Hydrochlorination: MGS reacts with hydrogen chloride to form trichlorosilane (HSiCl₃)

  • Distillation: Multiple distillation towers remove impurities like boron and phosphorus

  • Siemens Process: High-purity trichlorosilane is decomposed at 1100°C onto ultra-pure silicon rods, creating electronic-grade silicon (EGS) with 99.9999999% purity ("9N")

1.2 Ingot Growth

Two primary methods create single-crystal silicon ingots:

Czochralski (CZ) Method (80% of wafers)

  • EGS is melted in quartz crucibles at 1420°C

  • A seed crystal is dipped into the melt and slowly pulled (1-100mm/min) while rotating

  • Precise control of temperature gradients creates perfect single crystals

  • Doping occurs by adding precise amounts of boron (p-type) or phosphorus (n-type)

Float Zone (FZ) Method (for high-resistivity wafers)

  • A polycrystalline rod is zone-refined using RF heating

  • Produces crystals with lower oxygen content than CZ

Stage 2: Ingot Processing

2.1 Diameter Standardization

Ingots are ground to exact diameters:

  • 150mm (6"), 200mm (8"), 300mm (12") - with 450mm in development

  • Our laser measurement systems maintain ±0.1mm tolerance

2.2 Orientation Flats/Notches

  • Primary flat indicates crystal orientation (typically <110>)

  • Secondary flat denotes doping type

  • On 300mm wafers, notches replace flats for space efficiency

2.3 Resistivity Testing

Four-point probe measurements verify:

  • p-type: 1-100 ohm-cm

  • n-type: 0.001-100 ohm-cm

Stage 3: Wafer Slicing

3.1 Wire Saw Technology

  • Diamond-coated wires (0.1mm diameter) in slurry cut 300+ wafers simultaneously

  • Cutting speeds up to 2mm/min with <25µm thickness variation

  • Kerf loss reduced to 150µm through advanced wire guides

3.2 Edge Grinding

  • Precision grinding creates rounded edges to:

    • Prevent chipping

    • Reduce stress concentrations

    • Improve photoresist coating uniformity

Stage 4: Surface Preparation

4.1 Lapping & Etching

  • Double-side lapping achieves <1µm flatness

  • Acidic (HNO₃/HF) or alkaline (KOH) etching removes 20-50µm of damaged silicon

4.2 Polishing

  • Chemical-mechanical planarization (CMP) using:

    • Colloidal silica slurry (pH 10-11)

    • Polyurethane polishing pads

    • Downforce of 3-7 psi

  • Achieves surface roughness <0.2nm RMS

4.3 Cleaning

SC1/SC2 RCA cleaning removes:

  • Organic contaminants (H₂O₂/NH₄OH)

  • Metallic impurities (H₂O₂/HCl)

  • Particles down to <10/nm @ 45nm size

Stage 5: Metrology & Packaging

5.1 Quality Control

  • Thickness: Laser gauges measure to ±0.25µm

  • Flatness: Capacitive sensors detect <0.3µm TTV

  • Surface defects: Dark-field scanners detect >0.12µm particles

  • Crystal defects: X-ray topography identifies dislocations

5.2 Packaging

  • Class 1 cleanroom environment

  • Vacuum-sealed cassettes with nitrogen purge

  • Shipping containers with <1 PPM oxygen

Technical Specifications Comparison

Parameter150mm Wafer200mm Wafer300mm Wafer
Thickness675µm725µm775µm
Weight27g53g128g
Die/wafer*2004501,300
Bow/Warp<50µm<60µm<70µm

(*for typical 10mm² die)

Future Innovations

Our R&D focuses on:

  • 450mm wafer transition (40% more die/wafer)

  • Epitaxial growth with <0.5% thickness variation

  • SOI wafers with 25nm buried oxide layers

  • Patterned wafers with embedded nanostructures

Silicon wafers remain the most precisely engineered materials in human history - with over 200 controlled parameters in their manufacture. As we push toward atomic-level perfection, these crystalline foundations will continue enabling smaller, faster, and more efficient electronics for decades to come.


Home

Products

Phone

About

Inquiry