Quartz (SiO₂) is resistant to acids, alkalis, and corrosion, making it suitable for use in harsh process environments. Quartz wafers feature an extremely low thermal expansion coefficient (approximately 0.55×10⁻⁶/℃), which is close to that of silicon (2.6×10⁻⁶/℃). This similarity significantly reduces thermal stress issues during semiconductor processes.
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2026-03-13